HSM Fiber Optic Kawg- Lub ntsej muag lub ntsej muag Polish (APC) cov txheej txheem phiaj xwm
1. Cov Txheej Txheem Txheej Txheem
Txoj kev npaj no npaj rau kev sib tsoo hsm precision sib tsoo thiab polishing} {degree {{degree {5} {Angled lub cev hu rau (APC)Xaus - ntsej muag morphology. Cov txheej txheem no tau txhim kho qhov rov qab poob (RL) kev ua tau zoo ntawm high- ceev rov qab los ntawm kev xav rov qab, ua kom muaj kev sib txuas lus ruaj khov thiab teeb liab kev kis tau zoo thiab ntsuas teeb tsa laser ruaj khov.
2. Txheej Txheem
Raws li cov ntawv thov yuav tsum tau ua, txoj kev npaj ua no yuav tsum ua kom tiav cov ntsuas ntsuas qhov tseem ceeb hauv qab no (KPIS):
| Hom | Lub Hom Phiaj | Tus nqi zoo tagnrho | Kev Ntsuas Cov Qauv / Cov Khoom Siv |
|---|---|---|---|
| Nto roughness (ra) | < 20 nm | < 5 nm | Dawb lub teeb interferometer / atomic quab yuam tsom |
| Lub kaum sab xis (θ) | Teeb kaum-xis ± 0.2 degree | Teeb lub ± 0.1 Qib | Interferometer / tshwj xeeb lub kaum sab xis ntsuas ntsuas |
| Kev taw qhia kev ua ke | Dlhos yuam kev nrog tus yuam sij qis dua lossis sib npaug rau 1 degree | Dlhos yuam kev tsawg dua los yog sib npaug rau 0.5 degree | Lub tsom iav ua kom zoo nkauj thiab ua kom zoo |
| Ntug Ntsoov | Tsis pom muaj chips | Du, txuas ntxiv ntug | Tshuaj xyuas nyob rau hauv 100 x + tsom iav |
| Nto qhov tsis xws luag | Tsis muaj khawb, tsis muaj kab nrib pleb | Daim iav zoo tshaj plaws, qhov tsis taus - dawb | Raws li IEC 61300-3-35 tus qauv |
| Huv | Tsis muaj convxity / concotity, ua tiav kev sib cuag ntawm lub cev | Zoo meej PC / APC Tiv Thaiv | Kev cuam tshuam cuam tshuam fringes nrog cuam tshuam |
3. Cov Khoom Siv thiab Cov Ntaub Ntawv Sau
3.1 Cov Khoom Siv Tseem Ceeb
Cov khoom tseem ceeb:HSM precision lapping thiab polishing system
Nruab nrog tsawg - ceev, siab}} porque lub cev muaj zog (nrawm dua los yog sib npaug rau 15 rpm)
Precision Siab Tswj Kev Ntsuas System (Nkij 0-100G, Kev Raug Cai ± 1G)
Graphical neeg - tshuab interface (HMI) rau parameter chaw thiab saib xyuas
Tiag - lub sij hawm slurry golug drol System
3.2 TSHWJ XEEB KEV PAB THIAB KEV PAB CUAM
Angled Polishing Fixture:High - Precision Consure Kev ua kom pom tseeb thiab ua kom lub chaw thiab chaw thau khoom.
Polishing Pad:Polyurethane tshwj xeeb lossis tsis - Woven Polishing Pad rau APC Polishing.
Polishing Slurry:HSM tshwj xeeb silica lossis ceria - Raws li cov neeg kho tshuab polishing sulurry, nrog rau phaj ruaj khov thiab tsis ruaj khov.
Kev daws kev ntxuav tu:High - Kev pham-} kev siv dej tshwj xeeb (piv txwv li, isopropyl cawv).
Cov Khoom Siv Soj Ntsuam:Lub Teeb Dawb Dawb (piv txwv li, Bruker Contourgt), siab- daim ntawv sau cia, kev sim ntxig / rov qab ploj.
4. Cov ncauj lus kom ntxaws
Kauj ruam 1: Kev npaj qauv thiab kho (tswj tseem ceeb: tu thiab muab tso rau)
Tu:Ua kom huv si lub kaum sab xis thiab cov fiber ntau lub ntsej muag siv lint {{free wipes dawb thiab ntxuav tov.
Fixturing:Precisely load lub fiber ntau dua tshiab tsim mus rau qhov tshwj xeeb tsim qauv fixture, kom tau txais nws tag nrho cov khoom siv datum.
Muaj kev nyab xeeb:Kom zoo saib fixture thiab lub fiber ntau pigtail mus rau tus tswv tsev tshuab txoj kev sib koom tes fixture, kom ntseeg tau tus pigtail yog zoo huv si kom tsis txhob cuam tshuam nrog kev txav chaw.
Paub tseeb:Ua cov cim ua ntej nyob rau hauv lub tshuab tsom rau kev txheeb xyuas lub tshuab ua kom zoo yog qhov tseeb thiab lub ntsej muag fiber ntau yog zaum.
Kauj Ruam 2: Kev npaj poliing thiab ntsuas chaw (tswj qhov tseem ceeb: Qhov kev txhawb nqa tau yog parameter)
Tooling hloov:Hloov cov txheej txheem platen nrog cov xoos polishing.
Polishing Pad Txias:Pib ua cov txheej txheem txias. Mob ntawm Pad siv cov dej deionized rau kwv yees li 30 feeb kom ua tiav cov kev pom zoo lub xeev.
Slurry kev twb kev txuas:Kev txuas cov HSM tshwj xeeb polishing slurry lub raj mis rau cov slurry xa tawm system.
Parameter teeb:Cov tswv yim thiab paub meej tias cov txheej txheem hauv qab no ntawm HMI graphical interface:
Polishing Platen Ceev:10 - 15 rpm (qis ceev rau kev ruaj khov)
Slurry Flow tus nqi:Teeb raws li ncoo loj kom ntseeg tau tias muaj kev pab them nqi txhua yam (piv txwv: 10-20 ml / min)
POLISHULTION:20 - 80 g (ua kom zoo raws li cov hom fiber ntau thiab cov khoom siv tawv; thawj zaug pom zoo: 50G)
Lub sijhawm polishing:Teem raws li qhov chaw nyob tom qab thiab cov hom phiaj (piv txwv: 240 feeb / 4 teev, tuaj yeem stiged).
Kauj ruam 3: Polishing tiav thiab cov txheej txheem tshuaj xyuas
Tsis Siv Neeg Ua Haujlwm:Pib lub zog polishing. Cov cuab yeej yuav ua tiav txoj kev ua polishing raws li cov teeb tsa.
Tiag -} saib xyuas:Cov neeg ua haujlwm yuav tsum kuaj xyuas ruaj khov ruaj khov tsis ruaj khov, du thiab nyob ntsiag to Pad ua haujlwm, thiab nyeem ntawv siab qub.
Kauj ruam 4: Tshaj tawm - kev thiab kev ntxuav
Tshaj tawm - polish yaug:Tom qab ua tiav kev ua tiav, txav rau lub fixture rau lub chaw nres tsheb tu. Maj mam muab yaug lub ntsej muag kawg nrog dej ntws tawm kom tshem cov slurry seem.
Ultrasonic Tu (Yeem):Rau siab -}}} Xav tau cov khoom lag luam ,,, ceev}
Drying:Qhuav lub ntsej muag siv roj - dawb thiab noo noo - free compressed cua lossis nitrogen.
5. Kev Soj Ntsuam Zoo thiab Cov Qauv
Kev Ntsuam Xyuas Pom:Tshawb xyuas hauv qab ntau dua lossis sib npaug rau 100 x lub tsom iav. Lub ntsej muag kawg yuav tsum pub dawb ntawm khawb, tawg, tej daim, thiab paug.
Topography thiab Agle ntsuas:Siv lub teeb dawb nrawm txhawm rau ntsuas qhov kawg - Lub ntsej muag roughness (RA / RMS), tus nqi kaum sab xis (θ), thiab kev qhia.
Xeem Ntsuas:Siv cov IL / RL tester los txheeb xyuas qhov txuas txuas ntxiv (Il) thiab rov qab poob (RL> 65 DB rau APC connectors).
6. Cia siab tau txais thiab siv cov ntaub ntawv
Kev txheeb xyuas cov ntaub ntawv ntawm cov neeg siv khoom hauv daim ntawv, cov txiaj ntsig hauv qab no yuav tuaj yeem pom zoo tom qab siv cov phiaj xwm no:
Lub xeev pib:Rms roughness ~ 80 nm, pom txiav tej cim.
Tom qab Polishing:Rms roughnness tuaj yeem hloov kho rauHauv qab 15 nm, nrog cov chaw nyob ib puag ncig ncav cuag8 nm, ntsib cov<20 nm application requirement.
Zoo Tshaj:Pom tiaj thiab kos {- dawb hauv qab tsom tsom iav.
Tos:Los ntawm cov qauv kev coj ua thiab kev tswj cov txheej txheem, ua tiav tsis muaj pob txha lov lossis tawg ua kom muaj txiaj ntsig zoo.
Kev nyiam huv:Tom qab ntxuav tu, cov khoom tsis huv yog tshem tawm ntau.
7. Kev ceev faj
Kev Nyab Xeeb Ua Ntej:Hnav tsom iav kev nyab xeeb thaum ua haujlwm kom tsis txhob swb slurry txaws rau hauv lub qhov muag.
Huv ib puag ncig:Tag nrho cov txheej txheem yuav tsum tau ua hauv chav huv huv lossis chav huv kom tiv thaiv kom tsis txhob muaj plua plav.
Parameter Optimization:Cov txheej txheem teev tseg yog cov lus qhia dav dav. Kev sim me me-}}}}}}}}}}}} ecmeters yog qhov tsim nyog rau cov khoom sib txuas fiber ntau (piv txwv, SC / APC / APC) thiab cov ntaub ntawv.
Fixture nkawm:Nquag ntxuav thiab tshawb xyuas cov angled polishing fixture kom ntseeg tau nws qhov tseeb tseem tsis txawv.
