Cov wafer lapping polishing tshuab yog cov khoom tseem ceeb hauv teb ntawm cov semiconductor, thiab lwm yam siab {{precision nto ua. Nws lapping kev ua tau zoo yog nyob ntawm qhov tsim nyog sib xws ntawm cov abrasives thiab lapping cuab yeej cov ntaub ntawv. Hauv qab no yog cov ncauj lus kom ntxaws ntawm cov khoom haum rau cov khoom siv no:
I. ABASIVAS HOM
Abrasives yog cov xov xwm tseem ceeb uas koom nrog kev tshem tawm cov khoom.
Alumina - Raws abrasives (al₂o₃)
Lawv muaj cov tawv hardness siab thiab cov tshuaj zoo hauv kev ruaj khov, ua rau lawv cov neeg muaj cov abrasives. Haum rau ntxhoo lapping thiab semi-}} tiav ntawm cov ntaub ntawv hlau xws li hlau tawv thiab hlau cam. Nyob rau hauv wafer lapping tshuab, alumina abrasterives feem ntau siv hauv kev ua theem uas xav tau lub ntsej muag zoo nkauj tab sis tsis txhob xav tau daim iav kawg tiav.
Carbide -} Raws ablicon carbide (sic), boron carbide (b₄c))
Cov av tseem ceeb no muaj kev nyuaj thiab muaj zog hnav tsis kam. Silicon carbide yog tsuas yog siv rau kev ua nyuaj thiab cov ntaub ntawv loj xws li iav, ceramics, tsis yog- ferrous hlau; Boron carbide, ntawm qhov tod tes, yog siv rau lapping harder cov ntaub ntawv (xws li cemented carbides thiab nyuaj chrome coings). Cov hom abrasive ua rau cov khoom siv siab tshem tawm.
Pob zeb diamond - Raws cov abrasives
Raws li cov tshuaj nyuaj tshaj plaws hauv xwm, pob zeb diamond abrasives yog thawj qhov kev xaiv rau kev ua Super {{0} {cov ntaub ntawv nyuaj. Hauv kev ua yeeb yam ntxhib (lapping) theem ntawm wafer lapping tshuab, lub pob zeb deverse, cov khoom siv hluav taws xob, kev tso cai rau siab- precision planar ua.
Lwm cov abrasives
CERACE Oxide (CEO₂): Lub siab - Zoo polishbive polishing discidity nrog cov tshuaj kho tshuab polishing (CMP). Nws ua tiav qhov chaw siab heev ua tiav los ntawm kev sib xyaw ua ke ntawm cov tshuaj lom neeg thiab cov tshuab sib txhuam, thiab feem ntau siv rau kev sib txhuam zaum kawg ntawm silicon wafers thiab iav substrates.
Silica (sitio₂) colloid: feem ntau siv nyob rau hauv Ultra - Cov khaubncaws sabmab rau Ultomon, Silica txheej (piv txwv li, tooj liab interconnns). Nws muaj qhov tsawg kawg ntawm kev tshem tawm thiab muab cov khoom noj tau zoo.
Ii. Lapping Cov Ntaub Ntawv
Lapping cov cuab yeej (tseem hu ua cov phiaj polishing) yog cov khoom tseem ceeb uas tuav workpieces thiab abrasivesive, thiab xa cov lus tsa suab. Kev xaiv ntawm lawv cov ntaub ntawv ncaj qha cuam tshuam lub tiaj tiaj thiab ua tiav ntawm cov txheej txheem ua.
Cam khwb cia hlau Lapping Cov Cuab Yeej
Nrog cov khoom siv tawv tawv siab, hnav tsis kam, thiab siv tuab, cam khwb cia hlau Lapping cov nplej yooj yim embrasive nplej thiab tuaj yeem tswj txoj kev zoo nkauj zoo. Lawv feem ntau haum rau lapping cov ntaub ntawv hlau xws li tawv thiab sib txawv ntawm cov hlau uas tsis sib haum, thiab yog ib qho kev xaiv hlau thiab yog ib qho kev xaiv hlau ua kom huv si hauv wafer lapping tshuab.
Brass / Tin Lapping Cov Cuab Yeej
Cov cuab yeej lapping lapping thiab feem ntau siv rau lapping hlau cov ntaub ntawv (piv txwv li alloys) lossis raws li cov khoom siv hauv paus rau cov ntaub qhwv polishing. Cov cuab yeej dag dag lapping tuaj yeem tiv thaiv khawb ntawm cov npoo ntawm precision workpieces thiab tau siv dav hauv lub xeem kawg.
Polymer hluavtaws lapping cov cuab yeej (polishing cov ntaub qhwv)
Niaj hnub nimno wafefe lapping polishing tshuab, tshwj xeeb tshaj yog cov siv nyob rau hauv CMP txheej txheem, feem ntau siv Polishing cov ntaub ntawv ua los ntawm polymer cov ntaub ntawv xws li polyurethane. Cov ntaub ntawv no muaj qee cov qib elasticity, porosity, thiab hnav tsis kam, thiab tuaj yeem khaws cov khw muag khoom zoo dua thiab thauj khoom polishing. Nws yog lub ntsiab lus tseem ceeb rau kev ua tiav cov phiaj xwm thoob ntiaj teb.
Xaiv cov ntaub ntawv lapping yog qhov tseem ceeb rau kev ua tau zoo ntawm kev ua yeeb yam ntawm polishing tshuab:
Kev ua ntxhib (lapping): mus nrhiav cov ntaub ntawv txo qis, abrasives nrog siab tawv (xws li borbide (boron carbide) feem ntau tau ua khub nrog cov cuab yeej tawv miv xws li cam khwb cia hlau.
Tiav / Polishing: kom ua tiav cov ultra - Cov av du (piv txwv li cov pa roj cerid)
Yog li ntawd, qhov siab -} Ua tau zoo wafeit polishing tshuab tuaj yeem sib ntsib ntawm cov khoom siv ntxhib thiab cov txheej txheem zoo tagnrho rau kev tsim cov siab {Precision Cheebtsam.
Peb yog cov neeg tsim kev tshaj lij hauv Suav cov neeg tsim khoom lag luam tshwj xeeb hauv Wafer lapping tshuab. Peb muaj peb tus kheej lub hoobkas nrog cov khoom loj ntawm -} Cov khoom lag luam thiab kuj tseem lees txais cov khoom lag luam customized. Peb nyiam cov qhua tuaj noj mov nrog tus nqi qis thiab siab- kev pabcuam zoo. Txais tos rau nug thiab tau txais cov npe lus!
