Taw qhia
Feem ntau qhov chaw -tiav teeb meem hauv precision manufacturing raug liam rau ntawm lub tshuab lossis slurry. Nyob rau hauv kev xyaum, ib tug loj feem ntawm lawv taug qab mus rau lubpolishing ncoo- lub consumable uas zaum ntawm workpiece thiab lub platen thiab ntsiag to tswj planarity, tshem tawm tus nqi, thiab tsis xws luag.
Pads tsis yog cov khoom sib hloov. Hardness, groove geometry, cov khoom siv, thiab kev xyaum ua kom txias txiav txim siab seb tus txheej txheem puas muab ib qho chaw tiaj tus, tsis xws luag -dawb nto ntawm tus nqi kwv yees los yog drifts ntawm batch mus rau batch. Phau ntawv qhia no piav qhia txhua qhov sib txawv ua li cas, yog li koj tuaj yeem hais qhia lub ncoo rau qhov tshwm sim uas koj xav tau es tsis yog yuav ntawm tus nqi ib thooj.
Hisemi Technology muab cov tshuab lapping thiab polishing, pads, suspensions, thiab consumables rau semiconductor, optical, thiab precision engineering cov neeg muas zaub, thiab pad xaiv yog ib qho ntawm feem ntau cov lus nug peb lis.
Dab tsi Polishing Pad Ua tiag tiag
Lub polishing ncoo ua plaub txoj haujlwm ib zaug. Nws nqa thiab faib cov abrasive slurry thoob plaws lub workpiece, nws tuav lub flatness ntawm qhov chaw polished, nws tso cai rau cov tshuaj tiv thaiv cov khoom thiab cua sov kom dim, thiab nws muab cov neeg kho tshuab kev txhawb nqa uas converts platen motion rau hauv cov khoom tshem tawm.
Tshem tawm ib qho ntawm cov haujlwm ntawd thiab cov txheej txheem hloov tus cwj pwm. Ib lub ncoo uas faib cov slurry tsis zoo tshaib plab rau qhov chaw ntawm lub workpiece. Ib lub ncoo uas ua tau dhau los ua raws cov waviness uas twb muaj lawm es tsis txhob flattening nws. Ib lub ncoo uas ntxiab cov khib nyiab khawb qhov saum npoo nws yog los ua kom zoo dua.
Tias yog vim li cas kev xaiv pad yog qhov kev txiav txim siab ntawm cov txheej txheem, tsis yog kev yuav khoom.
Pad Hardness thiab nws cov teebmeem ntawm Planarity
Hardness yog thawj qhov sib txawv los kho. Cov ntaub qhwv tawv tawv tiv thaiv kev deformation, yog li lawv tuav lub ntsej muag zoo nkauj thoob plaws qhov chaw ua haujlwm thiab yog qhov kev xaiv raug thaum lub hom phiaj thiab nyob rau hauv -wafer uniformity tseem ceeb tshaj plaws. Softer pads ua tau yooj yim dua, uas yuav pab tau thaum lub ntsej muag muaj qhov chaw uas twb muaj lawm lossis thaum lub chaw ua haujlwm tsis muaj zog.
Kev lag luam- tawm yog qhov tsis xws luag thiab cov teebmeem ntawm ntug. Cov ntaub qhwv tawv heev tuaj yeem tsim cov ntug yob-tawm thiab tuaj yeem ua rau khawb khawb thaum cov khib nyiab nkag. Cov ntaub mos muag heev tshem tawm cov khoom siv qeeb dua thiab tawm tsam los kho qhov waviness.
Stacked kev tsim kho daws ib feem ntawm qhov kev tsis sib haum xeeb: ib txheej txheej tawv tawv muab kev sib luag thaum lub softer sub- txheej absorbs kev ua raws, muab zoo sib xws yam tsis muaj qhov tsis xws luag ntawm lub pob zeb nyuaj. Rau ntau cov txheej txheem kev sib xyaw ua ke no yog qhov ua tau zoo.
Groove Patterns thiab Slurry Thauj
Grooves tsis yog kho kom zoo nkauj. Lawv tswj hwm li cas slurry ncav cuag lub polishing interface, siv slurry thiab khib nyiab pov tseg li cas, thiab yuav ua li cas lub ncoo coj tus cwj pwm nyob rau hauv hydrostatic siab.
- Concentric groovesnplua cov txheej txheem uas slurry faib thoob plaws lub rotating platen yuav tsum tau sib npaug.
- Radial groovestxav slurry sai sai rau sab nraud, uas pab tshem tawm cov khib nyiab thiab txo qhov kev pheej hmoo ntawm agglomeration.
- XY lossis kab sib chawssib npaug thauj mus rau ob qho tib si cov lus qhia thiab yog ib qho uas uniformity hla ib square lossis rectangular workpiece teeb meem.
- Perforated padstuav slurry hauv hnab ris, uas tuaj yeem nce tus nqi tshem tawm ntawm cov ntaub ntawv nyuaj ntawm tus nqi ntawm qhov pheej hmoo me ntsis ntxiv.
Grooves kuj hloov qhov chaw sib cuag tau zoo. Cov qauv sib sib zog nqus, qhov dav dav txo qis kev sib cuag, uas txo qis kev tshem tawm tab sis feem ntau txhim kho kev sib luag. Thaum cov txheej txheem raug xa mus ntawm cov tshuab, zawj geometry yog ib qho ntawm thawj yam uas yuav tsum tau rov ua dua tshiab - xyuas.
Pad Khoom: Polyurethane, Composite, thiab Tsis yog -Woven
Feem ntau precision polishing pads yog polyurethane -raws li, vim hais tias cov khoom yuav raug formulated nyob rau hauv ib tug ntau hardness ntau yam thiab machined nrog zoo porosity. Pore loj thiab kev faib khoom tswj tau li cas lub ncoo tuav slurry thiab nws coj li cas thaum nws hnav.
Composite thiab stacked pads muab cov khaubncaws sab nraud povtseg ntawm qhov sib txawv hardness kom cais cov kev ua haujlwm ntawm kev ua raws li kev ua raws cai. Tsis yog -woven thiab xav tau- cov ntaub qhwv raws li siv tau qhov uas xav tau kev sib cuag softer, ntau conformable - ib txwm nyob rau hauv kho qhov muag xov thiab ib co hlau polishing kauj ruam.
Cov khoom xaiv kuj txiav txim siab txog kev sib raug zoo ntawm cov tshuaj. Qee cov slurries tawm tsam qee cov ntaub ntawv hauv ncoo, ua rau o, glazing, lossis hnav ntxov ntxov. Yog tias tus txheej txheem siv tshuaj lom neeg nruj heev, qhov kev sib cuam tshuam no yuav tsum raug lees paub ua ntej cov ntaub ntawv tshwj xeeb yog khov.
Sib piv lub ncoo rau lub workpiece
Lub workpiece txiav txim siab ntau npaum li qhov txheej txheem lub hom phiaj. Plaub rooj plaub npog feem ntau cov haujlwm:
Semiconductor wafersxav tau zoo heev planarity thiab tsawg defectivity, uas taw tes rau cov tawv los yog stacked pads nrog zoo, uniform porosity thiab kev qhuab qhia txias.
Optical Cheebtsam thiab iav substratesfeem ntau xav tau ib tug mos, conformable kev sib cuag kom tsis txhob subsurface puas, nrog pad xaiv tsav los ntawm cov nto tiav yuav tsum tau es tsis txhob tshem tawm tus nqi.
Hlau thiab ceramic precision qhov chawzaum hauv nruab nrab, thiab lub ncoo yog xaiv rau qhov yuav tsum tau flatness thiab nto roughness thaum ua kom tshem tawm tus nqi nyiaj txiag.
Nyias los yog yooj yim workpiecesxav tau kev txhawb nqa tsis tshua muaj siab thiab ua raws, qhov twg lub ncoo softer thiab txo kev sib cuag siab tiv thaiv kev tawg.
Sau qhov yuav tsum tau ua ua ntej xaiv: flatness, deg roughness, tshem tawm tus nqi, thiab tso cai rau qhov tsis xws luag. Ib lub ncoo uas yeej ntawm ib qho ntawm plaub tsis tshua muaj yeej ntawm lawv txhua tus.
Pad Conditioning thiab Kev Tswj Xyuas Lub Neej
Lub polishing ncoo hloov raws li nws siv. Pores glaze, grooves sau nrog khib nyiab, thiab qhov chaw compacts. Conditioning - feem ntau nrog lub pob zeb diamond disc - rov qhib qhov chaw thiab rov ua kom zoo li qub.
Conditioning xyaum txiav txim siab pad lub neej ntau npaum li lub ncoo nws tus kheej. Kev txias me ntsis thiab tshem tawm tus nqi poob, ua rau cov txheej txheem drift; ntau dhau thiab lub ncoo hnav thaum ntxov, ntxiv tus nqi thiab hloov qhov kev ntxhib los mos. Qhov zoo tshaj plaws yog feem ntau qhia raws li ib tug txias daim ntawv qhia: disc hom, load, ceev, thiab ntev.
Taug qab ncoo lub neej tiv thaiv kev ua tau zoo tiag tiag es tsis yog tiv thaiv kev suav ntawm wafers. Kev ntsuas kev tshem tawm thiab qib tsis xws luag ntawm lub sijhawm qhia koj thaum lub ncoo yog siv tiag tiag, thiab cov ntaub ntawv ntawd them rau nws tus kheej hauv cov khoom seem.
Consumable Nqi rau Wafer
Tus nqi yuav khoom ntawm polishing ncoo yog qhov tsis zoo rau tus nqi. Dab tsi tseem ceeb yog tus nqi ntawm ib qho khoom ua haujlwm zoo, uas suav nrog lub neej ncoo, slurry noj, txias consumables, thiab cov khoom seem tsim thaum cov txheej txheem drifts.
Ib lub ncoo kim dua uas tuav nws tus nqi tshem tawm ob zaug ntev li ntev tau thiab tsim cov khawb tsawg feem ntau raug nqi tsawg dua ib feem ntau dua li cov ntaub qhwv pheej yig hloov ob zaug ntau zaus. Qhov twg siv slurry tseem ceeb, lub ncoo nrog slurry tuav zoo tuaj yeem txo tag nrho cov khoom siv txawm tias lub ncoo nws tus kheej raug nqi ntau dua.
Tsim cov kev sib piv ntawm cov ntaub ntawv ntsuas los ntawm koj tus kheej kab: cov ntaub qhwv noj, wafers tsim, qhov tsis xws luag, thiab rov ua haujlwm dua. Qhov ntawd yog tib tus nqi qauv uas muaj sia nyob sib cuag nrog ntau lawm.
Daim ntawv teev Specification
Thaum qhia txog polishing ncoo, hais:
- Txheej txheem hom phiaj: flatness, deg roughness, tshem tawm tus nqi, thiab siab tshaj plaws tsis xws luag.
- Workpiece khoom, txoj kab uas hla, thiab thickness, ntxiv rau ntug rhiab heev.
- Pad hardness lossis hardness chav kawm, thiab kev tsim kho (monolithic lossis stacked).
- Groove qauv thiab qhov tob, thiab kev cia siab rau kev tswj hwm.
- Slurry chemistry thiab txhua yam kev paub txog tshuaj lom neeg sib raug zoo.
- Cia siab tias lub neej ntawm lub ncoo thiab yuav ua li cas thiaj paub tseeb hauv kev tsim khoom.
Common Mistakes Buyers Ua
- Xaiv tus nqi rau ib lub ncoo.Tus nqi rau ib qho khoom ua haujlwm zoo yog tib lub ntsiab lus.
- Tsis quav ntsej groove geometry thaum hloov cov txheej txheem.Grooves hloov kev sib cuag siab thiab thauj tus cwj pwm.
- Hla kev tshuaj ntsuam xyuas kev sib raug zoo.Aggressive slurry chemistry tuaj yeem rhuav tshem cov ntaub ntawv tsis raug.
- Conditioning los ntawm tus cwj pwm es tsis txhob ntawm daim ntawv qhia.Hauv qab - thiab tshaj - cua txias ob qho tib si ua rau drift.
- Kho lub neej ncoo raws li tus lej tas.Txheeb xyuas qhov ntsuas qhov tshem tawm thiab qib tsis raug.
FAQ
Q1: Kuv yuav xaiv lub polishing ncoo rau kuv cov txheej txheem li cas?
Pib los ntawm cov txheej txheem phiaj xwm - flatness, nto tiav, tshem tawm tus nqi, thiab tso cai tsis xws luag - ces phim hardness, kev tsim kho, groove qauv, thiab cov khoom. Siv tau nrog kev sim ua ntej khov qhov kev qhia tshwj xeeb.
Q2: Dab tsi yog qhov txawv ntawm ib qho nyuaj thiab mos polishing ncoo?
Cov ntaub qhwv tawv tawv tuav lub hom phiaj thiab qhov sib xws tab sis tuaj yeem ua rau muaj kev cuam tshuam ntawm ntug thiab khawb. Cov ntaub mos mos ua tau zoo dua thiab tiv thaiv cov khoom ua haujlwm tsis yooj yim tab sis tshem tawm cov khoom qeeb dua.
Q3: grooves ntawm polishing ncoo ua dab tsi?
Lawv faib cov slurry tshiab, tshem tawm cov slurry thiab cov khib nyiab, thiab hloov cov kev sib cuag zoo. Cov qauv thiab qhov tob ncaj qha cuam tshuam rau kev tshem tawm tus nqi thiab qhov sib xws.
Q4: Lub polishing ncoo ntev npaum li cas?
Nws nyob ntawm lub ncoo, daim ntawv qhia kev txias, thiab kev ua haujlwm. Taug qab tshem tawm tus nqi thiab qhov tsis xws luag es tsis yog xav tias suav wafer ruaj.
Q5: Vim li cas kuv lub ntsej muag polishing glaze?
Glazing tshwm sim thaum qhov pores compact thiab sau nrog cov khib nyiab, feem ntau yog los ntawm cov cua txias tsis txaus lossis qhov tsis zoo ntawm cov disc. Reconditioning restores kev ua tau zoo nyob rau hauv kev txwv; glazing hnyav yuav tsum tau hloov.
Q6: Puas yog ib qho polishing ncoo tuav ob qho tib si lapping thiab polishing?
Lawv yog cov haujlwm sib txawv nrog cov kev xav tau sib txawv. Lapping feem ntau siv ib qho nyuaj, nruj dua kev sib cuag los tswj kev tiaj tus, thaum polishing siv lub finer, feem ntau softer hu los txhim kho nto tiav. Dedicated consumables muab tau zoo dua.
Q7: Puas yog cov slurry xav tau kom phim lub polishing ncoo?
Yog lawm. Slurry chemistry, hom abrasive, thiab particle loj cuam tshuam nrog cov ntaub ntawv ncoo thiab porosity. Kev sib xyaw ua ke tsis sib xws tuaj yeem ua rau o, glazing, lossis tshem tawm tsis zoo.
Xaus
Lub polishing ncoo txiav txim siab planarity, tshem tawm tus nqi, thiab qib tsis xws luag raws li lub tshuab uas tig nws. Kho cov txheej txheem lub hom phiaj ua ntej, tom qab ntawd xaiv hardness thiab kev tsim kho, tom qab ntawd groove qauv, tom qab ntawd cov khoom siv - thiab siv tau tag nrho cov kev sib xyaw ua ke nrog kev txias thiab lub neej cov ntaub ntawv los ntawm koj tus kheej kab.
Hisemi Technology (Beijing) Ltd. muab cov tshuab lapping thiab polishing, polishing pads, pob zeb diamond suspensions, thiab lapping consumables rau semiconductor, kho qhov muag, thiab precision engineering daim ntaub ntawv, nrog rau kev pab rau cov txheej txheem kev loj hlob. Xa koj cov ntsiab lus workpiece rau peb thiab cov txheej txheem cov hom phiaj, thiab peb pab neeg yuav pom zoo ib lub ncoo thiab consumable set.
