1. Kho cov txheej txheem abrasive: los ntawm hardness txuam rau kev ua haujlwm customization
Kev xaiv ntawm abrasives, uas yog medasives rau cov neeg kho tshuab tshem tawm, yuav tsum sib npaug ntawm cov khoom siv tawv, thiab kev tswj hwm kev puas tsuaj polishing, thiab kev tswj hwm saum npoo av. Qhov no mus deb dhau ntawm kev ua kom yooj yim hardness.
Rau silicon wafers (mohs hardness ~ 7, molerate chemicala lossis alumina abrasives yog ib txwm muaj kev sib luag ntawm kev sib npaug tshem tawm tus nqi thiab thawj zaug kev npaj tseg. Txoj kev nplua polished spherical silica abrasives, qhov loj me 20 mus rau 50 nanometers, uas tuaj yeem txo cov npoo av saum npoo av rau hauv qab 0.1 nm. Ib qho tseem ceeb yog tswj cov abrasasive dispersion, feem ntau los ntawm kev ntxiv cov neeg sawv cev zoo li polyethylene glycol los tiv thaiv agglomeration thiab khawb.
Rau silicon carbide (mohs hardness ~ 9.2, ntxhib polbide abrasive (0.5} 1.} μders zoo li agar los tiv thaiv agglomeration. Zoo polishing sib zog ua kom muaj cov av me me uas muaj cov dej qab zib thiab "ntse), lossis" ntse "{8} {rhiab raw. Cov qauv siv no txhawb chemo - neeg kho tshuab syrnergy rau high efficiency, tsawg-puas polishing.
Rau gallium nitride (mohs hardness ~ 9, tab sis nquag rau corrosion nrog rhiab scica abra (0.5 {nm) yog nyiam kom tsawg dua. Lub siab tawv abrasives zoo li pob zeb diamond yog nruj me ntsis zam kom tiv thaiv kev puas tsuajtice kev puas tsuaj.
2. Kho cov tshuaj lom neeg muaj zog: los ntawm cov yooj yim etching rau symernistic matalysis
Cov khoom siv tshuaj lom neeg yuav tsum sib phim cov khoom siv kev pheej hmoo. Txoj kev sib tw tseem ceeb yog hais los ntawm kev tsim cov synero systeme nrog oxidizers, catalysts, thiab cov neeg sawv cev.
Hais txog oxidizer system, silicon polishing conventionally siv hydrogen peroxide uas yog oxidizer me me. Silicon carbide polishing yog hloov los ntawm cov ib txwm muaj kua qaub ua ke zoo li pom kev zoo nkauj ntsuab {{3} yooj yim}} pab fenton kev tiv thaiv. Gallium nitride polishing feem ntau ua haujlwm ib qho composite oxidizer ntawm hydrogen peroxide, txuas cov poov xab ua kom nrawm dua - ovching.
Cov neeg sawv cev ua haujlwm thiab hloov kho cov neeg sawv cev yog siv los daws cov teeb meem xws li kev puas tsuaj rau kev puas tsuaj thiab kev puas tsuaj saum npoo. Piv txwv li, sodium carbonate yog ntxiv rau sic slurries yog siv rau hauv silicon slurries rau chelate hlau impurities thiab txhim kho nto kev coj dawb huv.
Kev siv ntawm eco - Tus phooj ywg sib pab yog ib qho tseem ceeb. Qhov no cuam tshuam nrog oxidizers nrog lwm tus zoo li hydrogen peroxide, thiab siv cov txheej txheem ua haujlwm kom rov zoo thiab rov qab siv cov catalysts thiab abrasives.
3. Hloov kho kom haum thiab Ph: Los ntawm cov ranges tsau rau kev yoog raws kev yoog
Kev tswj hwm cov txiaj ntsig thiab PH muaj nuj nqis ncaj qha tswj tau qhov sib npaug ntawm cov tshuaj etching thiab kev kho tshuab hluav taws xob, xav tau kev haum siv kho kom haum raws li cov khoom siv thiab Polishing.
Rau pH tswj, silicon polishing yog feem ntau ua nyob rau hauv Alkaline tej yam kev mob (Ph 10 {{5) kom yaj cov txheej Silica. Silicon carbide polishing feem ntau yog cov "acidic ua ntej, alkaline tom qab"} Gan Epitaxial txheej polishing yuav tsum tau tswj kev tswj hwm ruaj khov-rau-weakenly alkaline ib puag ncig (pH 8-9) los tiv thaiv qhov chaw rhiab.
Cov kev xav ua tau zoo tshaj plaws pom kev sib txawv. Cov abrasive concenter (cov ntsiab lus muaj zog) xws li cov qib siab rau cov khoom siv phaog silicon rau cov gan, xav txog kev tswj hwm qhov xav tau dhau kev siv tshuab. Oxidizer concentrations kuj tseem ua kom zoo raws li qhov nyuaj ntawm oxidizing cov khoom.
Dynamic Admation Cov cim qhia txog qib siab polishing. Cov piv txwv suav nrog maj mam ua rau pH thaum silicon wafer-} REIRY} REI confracter
4. Hais cov kev sib tw tshwj xeeb nrog kev kho kom haum
Txhawm rau txhawm rau ntawm lub anisotropy ntawm silicon carbide (cov nqi tshem tawm sib txawv ntawm cov kab mob crystal), ua rau tus nqi tshem tawm ntau yam rau kev sib tw synchronous.
Rau kev tiv thaiv gallium ecitrafs txheej, cov qauv tshwj xeeb uas tsis muaj cov kuab tshuaj oxidizs me me, ua haujlwm kom tsis txhob ua kom muaj ultra {{diav txheej.
Txhawm rau kom ua tiav ntiaj teb plhaw ntawm silicon wafers, inhibitors zoo li benicon subttrate, ua kom cov khoom siv oxide tso tawm thiab tiv thaiv tsis meej.
Raws li cov chaw tsim khoom ncaj qha nyob hauv Suav teb, peb muab siab -} Zoo tshuaj lom neeg kho tshuab sib tw ntawm kev sib tw muag lag luam wholesale muag khoom siv.
Peb muaj rau ob qho tib si kev txiav txim thiab me me - kom muaj nuj nqis yuav khoom. Cov kev xaiv customization, suav nrog kev ntim tshwj xeeb lossis cov kev ua haujlwm tshwj xeeb, kuj muaj.
Peb cov khoom tau raug lees paub rau hauv ntiaj teb rau lawv cov kev ntseeg tau zoo thiab raug nqi} ua tau zoo, ua rau lawv xaiv qhov kev xaiv zoo rau cov neeg yuav thoob ntiaj teb.
Thov koj xav tiv tauj peb kom thov kom cov ncauj lus kom ntxaws.
